Analysis of Silicon Piezoresistive Readout Longitudinal Mode Microelectromechanical Resonators

Abstract

The vibration profile of silicon Piezoresistive readout Longitudinal Mode Microelectromechanical Resonators with different (8 sets of length) parameter has been investigated in this project, to find out how to optimize the resonator. The resonance frequency is inversely proportional to the length. It is found that the resonator can output a proper sine wave in terms of displacement but the outputted strain is not very close to a cosine wave. Even if the length is changed, the two graphs are not significantly affected. Furthermore, piezoresistance is found from stress, the corresponding current can then be found as well. The current change against applied force is used as an indicator to figure out how the length affects the performance of the resonator. The result shows that the longer the length is, the better the performance is.