Analysis of Contour Bulk Mode Resonators Utilizing Piezoresistive Sensing

Abstract

This project aims to analyse and exposure the square-extension (SE) mode resonator utilizing piezo-resistive sensing. In order to provide a better performance in the piezo-resistive sensing utilization, a high quality factor (Q-factor) and high piezo-resistive gain of the resonator are demanded. Normally, a larger tether cap length weakens the Q-factor while enhancing the piezo-resistive gain. Therefore, the trade-off between Q-factor and piezo-resistive was expected. With simulation of the resonator models in a finite element (FE) simulation tool, COMSOL, this work examines the effects on these two parameters by varying the T-shape tether length. Three main studies which are carried out in this project are the relationship of tether cap length to Q-factor, the relationship of tether cap length to piezo-resistive gain and relationship of Q-factor to pizo-resistive gain in the device.